Effect of Catalyst on the Growth of Diamond-like Carbon by HFCVD

Document Type : Research Paper

Authors

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Abstract

Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD)
technique. In the present work, we investigated the quality of the DLC films groew on the substrates
that were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 renders
the growth of carbon nanostructures technique (diamond like carbon). The utilized samples were
characterized by the scanning electron microscopy (SEM) and Raman spectroscopy techniques.

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